A high capacity vacuum pump inlet trap for semiconductor wafer manufac-turing processes that prevents heavy particulate byproducts from damaging pumps is available from Mass-Vac, Inc. They are ideal for LPCVD, PECVD, and ALD processes and can be easily configured to a wafer manufacturer’s requirements.
NORTH BILLERICA, Mass. (PRWEB) April 15, 2020
Mass-Vac, Inc. has introduced a high capacity vacuum pump inlet trap for semiconductor wafer manufacturing processes that prevents heavy particulate byproducts from damaging pumps.
The MV Multi-Trap® 12” Vacuum Inlet Trap is made from stainless steel, has a large first stage knock-down baffle, and can be equipped with different port sizes and placement, and a wide range of filter elements. Ideal for LPCVD, PECVD, and ALD processes, it can be easily configured to a wafer manufacturer’s requirements and when stacked features four stages of filtration that are capable of up to 2,500 cu.in. of solids accumulation.
Filtration options for MV Multi-Trap® 12” Vacuum Inlet Traps include 4.5” and 9” elements made of stainless steel gauze, copper gauze, polypropylene in 2, 5, and 20 micron sizes, Sodasorb®, activated alumina, activated charcoal and molecular sieve which are user selectable. Capable of trapping particulates and condensables, these high capacity traps prevent accumulation in the foreline, throttle valve, and in dry vacuum pumps.
The MV Multi-Trap® 12” Vacuum Inlet Trap is priced from $2,895.00 each with filter elements sold separately. Pricing is available upon request.
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